Concepedia
Statistics
Publications
3
Citations
73
H-Index
Active since
2020
Affiliations
Sungkyunkwan University(Current)
Samsung (South Korea)
Sung-Hoon Bae is an author at Sungkyunkwan University specializing in engineering, slurry flow, and materials science.
Publications per year
2020–2022
Investigation of thermal effects in copper chemical mechanical polishing
Pengzhan Liu, Sung-Hoon Bae, Seok‐Jun Hong et al. · Precision Engineering · 2021 · 27 citations
Engineering, Materials Engineering, Materials Science +14
A numerical study on slurry flow with CMP pad grooves
Seok‐Jun Hong, Sung-Hoon Bae, Seulgi Choi et al. · Microelectronic Engineering · 2020 · 25 citations
Engineering, Computational Engineering, Computational Fluid Dynamics +7
Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing
Yeongkwang Cho, Pengzhan Liu, Sanghuck Jeon et al. · Applied Sciences · 2022 · 21 citations · Full text
Engineering, Materials Engineering, Materials Science +15
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