Concepedia
Statistics
Publications
4
Citations
64
H-Index
Active since
2021
Affiliations
Sungkyunkwan University(Current)
University of Shanghai for Science and Technology
Shanghai University
Samsung (South Korea)
Yeongkwang Cho is an author at Sungkyunkwan University specializing in chemical engineering, engineering, and mechanical engineering.
Top concepts
EngineeringMaterial ScienceChemical EngineeringMechanical EngineeringMicrostructureSurface ScienceRheologyCorrosionNanomaterialsNanotechnology
Publications per year
2021–2023
Investigation of abrasive behavior between pad asperity and oxide thin film in chemical mechanical planarization
Sanghuck Jeon, Jungryul Lee, Seok‐Jun Hong et al. · Materials Science in Semiconductor Processing · 2021 · 19 citations
Materials Engineering, Materials Science, Chemical Engineering +10
Simulation and Experimental Investigation of the Radial Groove Effect on Slurry Flow in Oxide Chemical Mechanical Polishing
Yeongkwang Cho, Pengzhan Liu, Sanghuck Jeon et al. · Applied Sciences · 2022 · 19 citations · Full text
Engineering, Mechanical Engineering, Radial Groove Effect +20
Auxiliary mechanism of in-situ micro-nano bubbles in oxide chemical mechanical polishing
Lei Xu, Pengzhan Liu, Hong Lei et al. · Precision Engineering · 2021 · 13 citations
Materials Science, Chemical Engineering, Engineering +10
Chemically-induced active micro-nano bubbles assisting chemical mechanical polishing: Modeling and experiments
Lei Xu, Ki‐Hong Park, Hong Lei et al. · Friction · 2023 · 13 citations · Full text
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