Concepedia

Stefan Hien

SH

4

Publications

65

Citations

4

H-Index

1993

Active since

Affiliations

University of Wisconsin–Madison(Current)

Stefan Hien is an author at University of Wisconsin–Madison specializing in engineering, chemistry, and applied physics.

Top concepts

EngineeringChemistryApplied PhysicsOptical MaterialsSoft MatterLaser DamageSpectroscopyOphthalmologyNanotechnologyPhotochemistry

Publications per year

1993–2002

4

Publications

4

Collapse behavior of single layer 193- and 157-nm resists: use of surfactants in the rinse to realize the sub-130-nm nodes

Stefan Hien, Georgia K. Rich, Gilbert Molina et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 24 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +23

Compact fluorescent lamps

A. Heidemann, Stefan Hien, Eva Panofski et al. · IEE Proceedings A Science Measurement and Technology · 1993 · 17 citations

Optical Materials, Engineering, Compact Fluorescent Lamps +8

Photoresist outgassing at 157 nm exposure

Stefan Hien, Steve Angood, Dominic Ashworth et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 14 citations

Optical Materials, Engineering, Laser Ablation +17

Acid diffusion analysis in the chemically amplified CARL resist

Ernst Richter, Stefan Hien, Michael Sebald · Microelectronic Engineering · 2000 · 10 citations

Acid Diffusion Analysis, Chemical Engineering, Engineering +6

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