Hisashi Yano

Impact of film structure on damage to low-<i>k</i>SiOCH film during plasma exposure

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Structure-designable method to form super low-<i>k</i>SiOC film (<i>k</i>= 2.2) by neutral-beam-enhanced chemical vapour deposition

Shigeo Yasuhara, Juhyun Chung, Kunitoshi Tajima et al. · Journal of Physics D Applied Physics · 2009 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

A 1.4&amp;#x00B5;m front-side illuminated image sensor with novel light guiding structure consisting of stacked lightpipes

Hisashi Watanabe, Jun Hirai, Motonari Katsuno et al. · 2011 · 19 citations

Engineering, Electrical Engineering, Materials Science +16

Super-low-k SiOCH film (k = 1.9) with extremely high water resistance and thermal stability formed by neutral-beam-enhanced CVD

Shigeo Yasuhara, Toru Sasaki, Tsutomu Shimayama et al. · Journal of Physics D Applied Physics · 2010 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +17