Statistics
Publications
2
Citations
23
H-Index
2
Active since
2018
Affiliations
Tokyo Electron (Japan)(Current)
Takamichi Kikuchi is an author at Tokyo Electron (Japan) specializing in thin films, plasma-enhanced atomic layer deposition, and titanium oxides.
Publications per year
2018–2018
2
2
Shinya Iwashita, Tsuyoshi Moriya, Takamichi Kikuchi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2018 · 13 citations
Natural Sciences, Materials Engineering, Materials Science +15
1–2 of 2