Statistics
Publications
2
Citations
63
H-Index
2
Active since
1990
Affiliations
Nagano University(Current)
Yasuyuki Nakazato is an author at Nagano University specializing in wafer bonding, silicon wafer processing, and silicon materials.
Publications per year
1990–1993
2
2
Silicon Wafer-Bonding Process Technology for SOI Structures
Tomoyuki Abe, Masatake Nakano, T. Itho et al. · 1990 · 17 citations
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