Jun-Ki Kim

Effects of B[sub 2]H[sub 6] Pretreatment on ALD of W Film Using a Sequential Supply of WF[sub 6] and SiH[sub 4]

Soo‐Hyun Kim, Eui-Seong Hwang, Baek-Mann Kim et al. · Electrochemical and Solid-State Letters · 2005 · 29 citations

Characteristics of ALD Tungsten Nitride Using B2H6, WF6, and NH3 and Application to Contact Barrier Layer for DRAM

Soo‐Hyun Kim, Jun-Ki Kim, Ju Hee Lee et al. · Journal of The Electrochemical Society · 2007 · 26 citations

Speckle Reduction in Near-field Image of Multimode Fiber with a Piezoelectric Transducer

Woosung Ha, Sejin Lee, Kyunghwan Oh et al. · Journal of the Optical Society of Korea · 2008 · 22 citations · Full text

Piezoelectric Transducer, Near-field Speckle Noise, Engineering +15

Atomic Layer Deposition of Low-Resistivity and High-Density Tungsten Nitride Thin Films Using B[sub 2]H[sub 6], WF[sub 6], and NH[sub 3]

Soo‐Hyun Kim, Jun-Ki Kim, Noh-Jung Kwak et al. · Electrochemical and Solid-State Letters · 2006 · 21 citations

Characterizations of Pulsed Chemical Vapor Deposited-Tungsten Thin Films for Ultrahigh Aspect Ratio W-Plug Process

Soo‐Hyun Kim, Eui-Sung Hwang, Seung-Chul Ha et al. · Journal of The Electrochemical Society · 2005 · 20 citations

Materials Science, Surface Technology, Engineering +13