Statistics
Publications
11
Citations
276
H-Index
10
Active since
1999
Affiliations
NEC (Japan)(Current)
Tomonori Mukai is an author at NEC (Japan) specializing in materials science, etching processes, and materials engineering.
Publications per year
1999–2007
11
11
Seiji Samukawa, Tomonori Mukai · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 41 citations
Natural Sciences, Chemistry, Physics +11
Reactive and anisotropic etching of magnetic tunnel junction films using pulse-time-modulated plasma
Tomonori Mukai, Norikazu Ohshima, H. Hada et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2007 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +17
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