Concepedia

Bjoern A. M. Hansson

BA

4

Publications

102

Citations

4

H-Index

2000

Active since

Affiliations

KTH Royal Institute of Technology(Current)

Bjoern A. M. Hansson is an author at KTH Royal Institute of Technology specializing in applied physics, engineering, and optoelectronics.

Top concepts

Applied PhysicsEngineeringOptoelectronicsTechnologyLaser Plasma PhysicsPhysicsEducationPlasma PhysicsInstrumentationMicroelectronics

Publications per year

2000–2002

4

Publications

4

A liquid-xenon-jet laser-plasma x-ray and EUV source

Bjoern A. M. Hansson, L. Rymell, M. Berglund et al. · Microelectronic Engineering · 2000 · 47 citations

Laser Plasma Physic, Applied Physics, Liquid-xenon-jet Laser-plasma X-ray +1

Status of the liquid-xenon-jet laser-plasma source for EUV lithography

Bjoern A. M. Hansson, L. Rymell, Magnus Berglund et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 30 citations

Engineering, Applied Physics, Laser-plasma Interaction +9

<title>Xenon liquid-jet laser plasma source for EUV lithography</title>

Bjoern A. M. Hansson, Magnus Berglund, O. Hemberg et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 13 citations

Engineering, Xenon Jet, Laser Plasma Physics +10

<title>Liquid-xenon-jet laser-plasma source for EUV lithography</title>

Bjoern A. M. Hansson, L. Rymell, Magnus Berglund et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 12 citations

Engineering, Laser Plasma Physics, Applied Physics +13

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