Bjoern A. M. Hansson

Author

Also Known As

B HANSSON, Bjoern A. M. Hansson

Publications

112

Citations

H-Index

Concepts

All Affiliations

Bjoern A. M. Hansson is an author at KTH Royal Institute of Technology specializing in applied physics, engineering, and optoelectronics.

#	Concept	H-Index	Publications	Citations
1	Applied Physics	4	4	102
2	Engineering	3	3	55
3	Education	1	1	12
4	Physics	1	1	47
5	Laser Applications	1	1	12

Bjoern A. M. Hansson

Publications

102

Citations

H-Index

Page 1

	Year	Citations
A liquid-xenon-jet laser-plasma x-ray and EUV source Bjoern A. M. Hansson, L. Rymell, M. Berglund, Microelectronic Engineering Laser Plasma PhysicApplied PhysicsLiquid-xenon-jet Laser-plasma X-rayPhysics	2000	47
Status of the liquid-xenon-jet laser-plasma source for EUV lithography Bjoern A. M. Hansson, L. Rymell, Magnus Berglund, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringApplied PhysicsLaser-plasma InteractionLaser Plasma PhysicRecent Improvements	2002	30
<title>Xenon liquid-jet laser plasma source for EUV lithography</title> Bjoern A. M. Hansson, Magnus Berglund, O. Hemberg, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringXenon JetLaser Plasma PhysicsEuv LithographyApplied Physics	2000	13
<title>Liquid-xenon-jet laser-plasma source for EUV lithography</title> Bjoern A. M. Hansson, L. Rymell, Magnus Berglund, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringLaser Plasma PhysicsApplied PhysicsLaser ApplicationsMirror Contamination	2001	12

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