Atsushi Itoh Atsushi Itoh

Publications

142

Citations

H-Index

1999

Active since

Affiliations

Atsushi Itoh Atsushi Itoh is an author at Tokyo Institute of Technology specializing in applied physics, electrical engineering, and microelectronics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsElectrical EngineeringElectronic EngineeringDevice ModelingNanoelectronicsElectronic DevicesIntegrated CircuitsOxide Semiconductors

Publications per year

1999–2000

Publications

Analysis of Short-Channel Schottky Source/Drain Metal-Oxide-Semiconductor Field-Effect Transistor on Silicon-on-Insulator Substrate and Demonstration of Sub-50-nm n-type Devices with Metal Gate

W. Saitoh, Atsushi Itoh Atsushi Itoh, Shigeharu Yamagami et al. · Japanese Journal of Applied Physics · 1999 · 88 citations

Device Modeling, Electrical Engineering, Metal Gate +12

A 25-nm-long Channel Metal-Gate p-Type Schottky Source/Drain Metal-Oxide-Semiconductor Field Effect Transistor on Separation-by-Implanted-Oxygen Substrate

Atsushi Itoh Atsushi Itoh, Masayuki Saitoh, Masahiro Asada · Japanese Journal of Applied Physics · 2000 · 32 citations

Electrical Engineering, Engineering, Electronic Engineering +6

35 nm Metal Gate p-type Metal Oxide Semiconductor Field-Effect Transistor with PtSi Schottky Source/Drain on Separation by Implanted Oxygen Substrate

W. Saitoh, Shigeharu Yamagami, Atsushi Itoh Atsushi Itoh et al. · Japanese Journal of Applied Physics · 1999 · 22 citations

Semiconductor Technology, Electrical Engineering, Electronic Devices +15

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