Concepedia

Soon-Young Oh

SO

2

Publications

35

Citations

2

H-Index

2002

Active since

Affiliations

Gwangju Institute of Science and Technology(Current)

Soon-Young Oh is an author at Gwangju Institute of Science and Technology specializing in applied physics, surface science, and materials science.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceChemistryNanotechnologyNanoelectronicsPolymer ScienceMicroelectronicsPolymer Chemistry

Publications per year

2002–2005

2

Publications

2

Plasma polymerization and deposition of linear, cyclic and aromatic fluorocarbons on (100)-oriented single crystal silicon substrates

Guang Yang, Soon-Young Oh, E. T. Kang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2002 · 21 citations

Engineering, Organic Electronics, Glow Discharge +19

Highly thermal robust NiSi for nanoscale MOSFETs utilizing a novel hydrogen plasma immersion ion implantation and Ni-Co-TiN tri-layer

Jang-Gn Yun, Soon-Young Oh, Bin-Feng Huang et al. · IEEE Electron Device Letters · 2005 · 14 citations

Engineering, Silicon On Insulator, Semiconductor Device +16

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