Concepedia

Taijiro Uchida

TU

Statistics

Publications

15

Citations

412

H-Index

13

Active since

1976

Affiliations

Ulvac (Japan)(Current)

The University of Tokyo

Taijiro Uchida is an author at Ulvac (Japan) specializing in engineering, electrical engineering, and plasma physics.

Top concepts

EngineeringElectrical EngineeringPlasma PhysicsApplied PhysicsPhysicsMagnetohydrodynamicsPlasma ScienceMicroelectronicsPlasma ConfinementPlasma Theory

Publications per year

1976–2008

15

Publications

15

Application of Radio-Frequency Discharged Plasma Produced in Closed Magnetic Neutral Line for Plasma Processing

Taijiro Uchida · Japanese Journal of Applied Physics · 1994 · 73 citations

Electrical Engineering, Engineering, Many Kinds +7

Magnetic neutral loop discharge (NLD) plasmas for surface processing

Taijiro Uchida, Satoshi Hamaguchi · Journal of Physics D Applied Physics · 2008 · 60 citations

Electrical Engineering, Engineering, Physics +12

Usefulness of Magnetic Neutral Loop Discharge Plasma in Plasma Processing

Hideo Tsuboi, Masahiro Itoh, Masafumi Tanabe et al. · Japanese Journal of Applied Physics · 1995 · 53 citations

Sio 2, Electrical Engineering, Engineering +10

Plasma Production Using Energetic Meandering Electrons

Zensho Yoshida, Taijiro Uchida · Japanese Journal of Applied Physics · 1995 · 41 citations

Plasma Production, Electrical Engineering, Engineering +12

Electron Temperature and Density Profiles in a Neutral Loop Discharge Plasma

Tatsuya Sakoda, Hironori Iwamiya, Kiichiro Uchino et al. · Japanese Journal of Applied Physics · 1997 · 28 citations

Electron Density, Electrical Engineering, Engineering +11

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1–5 of 15