Tsai-Sheng Gau

Statistics

Publications

Citations

116

H-Index

Active since

2000

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Taiwan Semiconductor Manufacturing Company (United States)

National Tsing Hua University

Tsai-Sheng Gau is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, computer engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsMicroelectronicsComputer EngineeringVlsi DesignNanoelectronicsOptoelectronicsElectrical EngineeringInstrumentationComputational Imaging

Publications per year

2000–2024

Publications

Customized illumination aperture filter for low k 1 photolithography process

Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 23 citations

Engineering, Electron-beam Lithography, Optic Design +18

Novel 20nm hybrid SOI/bulk CMOS technology with 0.183μm/sup 2/ 6T-SRAM cell by immersion lithography

Hou-Yu Chen, Chang-Yun Chang, Chien-Chao Huang et al. · 2005 · 18 citations

Electrical Engineering, Engineering, Vlsi Design +14

Multiple-image-depth modeling for hotspot and AF printing detections

Y. P. Tang, C. S. Chou, Wen‐Chun Huang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

Engineering, Computer-aided Design, Image Sensor +19

A 65nm node strained SOI technology with slim spacer

Fu-Liang Yang, Chien-Chao Huang, Hou-Yu Chen et al. · 2004 · 13 citations

Electrical Engineering, Soi Technology, Engineering +11

Influence of shot noise on CDU with DUV, EUV, and E-beam

Zhih-Yu Pan, Chun-Kuang Chen, Tsai-Sheng Gau et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations

Engineering, Electron-beam Lithography, Microscopy +17

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