Concepedia

Ru-Gun Liu

RL

Statistics

Publications

4

Citations

82

H-Index

4

Active since

2000

Affiliations

Taiwan Semiconductor Manufacturing Company (Taiwan)(Current)

Ru-Gun Liu is an author at Taiwan Semiconductor Manufacturing Company (Taiwan) specializing in engineering, optoelectronics, and applied physics.

Top concepts

EngineeringOptoelectronicsApplied PhysicsInstrumentationMicroelectronicsMicrofabricationOptical PropertiesComputer EngineeringElectronic PackagingPhysics

Publications per year

2000–2015

4

Publications

4

Two threshold resist models for optical proximity correction

Wen‐Chun Huang, Chia-Hui Lin, Chin-Chen Kuo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 35 citations

Resist Model, Photonics, Optical Materials +12

Customized illumination aperture filter for low k 1 photolithography process

Tsai-Sheng Gau, Ru-Gun Liu, Chun-Kuang Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 23 citations

Engineering, Electron-beam Lithography, Optic Design +18

EUV and e-beam manufacturability

Yao‐Wen Chang, Ru-Gun Liu, Shao‐Yun Fang · 2015 · 14 citations

Engineering, Electron-beam Lithography, Industrial Engineering +18

Mask cost and cycle time reduction

Hong-Chang Hsieh, Johnson C. Hung, Angus Chin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 10 citations

Mathematical Programming, Engineering, Electron-beam Lithography +19

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