Concepedia
Statistics
Publications
4
Citations
66
H-Index
Active since
2022
Affiliations
National Tsing Hua University(Current)
Taiwan Semiconductor Manufacturing Company (United States)
Po-Hsiung Chen is an author at National Tsing Hua University specializing in functional materials, nanomaterials, and engineering.
Top concepts
HydrogenChemistryMicroscopyEngineeringNanomaterialsNanotechnologyPhotochemistryCrystallographyMaterial ScienceInorganic Chemistry
Publications per year
2022–2024
Novel hexameric tin carboxylate clusters as efficient negative-tone EUV photoresists: high resolution with well-defined patterns under low energy doses
Jia‐Rong Wu, Ting‐An Lin, Yanru Wu et al. · Nanoscale Advances · 2023 · 25 citations · Full text
Partial decarboxylation of hafnium oxide clusters for high resolution lithographic applications
Pin-Chia Liao, Po-Hsiung Chen, Yu‐Fang Tseng et al. · Journal of Materials Chemistry C · 2022 · 18 citations
Engineering, Electron-beam Lithography, Microscopy +18
Highly hydroxylated hafnium clusters are accessible to high resolution EUV photoresists under small energy doses
Yu‐Fang Tseng, Pin-Chia Liao, Po-Hsiung Chen et al. · Nanoscale Advances · 2023 · 12 citations · Full text
Synthesis of pentameric chlorotin carboxylate clusters for high resolution EUV photoresists under small doses
Cheng-Dun Li, Ting‐An Lin, Po-Hsiung Chen et al. · Nanoscale Advances · 2024 · 11 citations · Full text
1–4 of 4