H. C. Sun

Novel étalon fringe rejection technique for laser absorption spectroscopy

H. C. Sun, Edward A. Whittaker · Applied Optics · 1992 · 45 citations

Engineering, Physics, éTalon Fringes +12

Sensitive plasma etching endpoint detection using tunable diode laser absorption spectroscopy

H. C. Sun, Vipulkumar K. Patel, Bhupinder Singh et al. · Applied Physics Letters · 1994 · 15 citations

Engineering, Silicon On Insulator, Plasma Processing +16

Combined wavelength and frequency modulation spectroscopy: a novel diagnostic tool for materials processing

H. C. Sun, Edward A. Whittaker, Y. W. Bae et al. · Applied Optics · 1993 · 14 citations

Measurements of neutral species in low pressure C2F6 discharges using diode laser absorption spectroscopy

H. C. Sun, Vipulkumar K. Patel, Edward A. Whittaker et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1993 · 12 citations

Electrical Engineering, Neutral Species, Engineering +15

Real-time <i>in situ</i> detection of SF6 in a plasma reactor

H. C. Sun, Edward A. Whittaker · Applied Physics Letters · 1993 · 10 citations

Absorption Line, Engineering, Optical Testing +26