Concepedia

Y. W. Bae

YW

3

Publications

55

Citations

3

H-Index

1992

Active since

Affiliations

Stevens Institute of Technology(Current)

Y. W. Bae is an author at Stevens Institute of Technology specializing in thin films, applied physics, and chemistry.

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Publications per year

1992–1998

3

Publications

3

Structure and chemistry of silicon nitride and silicon carbonitride thin films deposited from ethylsilazane in ammonia or hydrogen

Y. W. Bae, H. Du, B. Gallois et al. · Chemistry of Materials · 1992 · 30 citations

, , +14

Combined wavelength and frequency modulation spectroscopy: a novel diagnostic tool for materials processing

H. C. Sun, Edward A. Whittaker, Y. W. Bae et al. · Applied Optics · 1993 · 14 citations

Deposition and Chemical Composition of Silicon Oxynitride from Methylsilazane in Ammonia and Nitrous Oxide

Y. W. Bae, B. Gallois, B. J. Wilkens et al. · Journal of The Electrochemical Society · 1998 · 11 citations

, , +18

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