Concepedia

Motofumi Komori

MK

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Publications

2

Citations

31

H-Index

2

Active since

1995

Affiliations

Toshiba (Japan)(Current)

Motofumi Komori is an author at Toshiba (Japan) specializing in applied physics, physics, and technology.

Top concepts

Publications per year

1995–2017

2

Publications

2

Metrology and inspection required for next generation lithography

Masafumi Asano, Ryoji Yoshikawa, Takashi Hirano et al. · Japanese Journal of Applied Physics · 2017 · 19 citations

, , +21

Xenon excimers produced from xenon clusters in a quasi-continuous-wave jet discharge

Motofumi Komori, K. Mitsuhashi, Tatsushi Igarashi et al. · Optics Letters · 1995 · 12 citations

, , +7

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