Statistics
Publications
6
Citations
86
H-Index
6
Active since
1992
Affiliations
Panasonic (Japan)(Current)
Akio Misaka is an author at Panasonic (Japan) specializing in device simulation, surface science, and surface reaction mechanisms.
Publications per year
1992–2002
6
6
A statistical critical dimension control at CMOS cell level
Akio Misaka, A. Goda, Koji Matsuoka et al. · 2002 · 12 citations
Engineering, Computer Engineering, Electrical Engineering +11
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