C.E. Tsai

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Publications

Citations

338

H-Index

Active since

1995

Affiliations

National Yang Ming Chiao Tung University(Current)

Institute of Electronics

C.E. Tsai is an author at National Yang Ming Chiao Tung University specializing in natural sciences, materials science, and chemical vapor deposition.

Publications per year

1995–1998

Publications

Comparison of the diffusion barrier properties of chemical-vapor-deposited TaN and sputtered TaN between Cu and Si

Mei‐Hui Tsai, Shuo Sun, C.E. Tsai et al. · Journal of Applied Physics · 1996 · 174 citations

Natural Sciences, Materials Engineering, Materials Science +17

Metalorganic chemical vapor deposition of tantalum nitride by tertbutylimidotris(diethylamido)tantalum for advanced metallization

Mei‐Hui Tsai, Shuo Sun, Hsin‐Tien Chiu et al. · Applied Physics Letters · 1995 · 78 citations

Natural Sciences, Materials Engineering, Materials Science +15

Metal-organic chemical vapor deposition of tantalum nitride barrier layers for ULSI applications

Mei‐Hui Tsai, Shuo Sun, C.P. Lee et al. · Thin Solid Films · 1995 · 54 citations

Natural Sciences, Materials Engineering, Materials Science +15

Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

Hsin‐Tien Chiu, Shiow‐Huey Chuang, C.E. Tsai et al. · Polyhedron · 1998 · 32 citations

Natural Sciences, Chemistry, Materials Science +8

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