Concepedia

C.E. Tsai

CT

Statistics

Publications

4

Citations

338

H-Index

4

Active since

1995

Affiliations

National Yang Ming Chiao Tung University(Current)

Institute of Electronics

C.E. Tsai is an author at National Yang Ming Chiao Tung University specializing in engineering, materials engineering, and materials science.

Top concepts

EngineeringSurface ScienceMaterial ScienceMaterials EngineeringChemistryApplied PhysicsChemical EngineeringThin FilmsPhotovoltaicsMicrostructure

Publications per year

1995–1998

4

Publications

4

Comparison of the diffusion barrier properties of chemical-vapor-deposited TaN and sputtered TaN between Cu and Si

Mei‐Hui Tsai, Shuo Sun, C.E. Tsai et al. · Journal of Applied Physics · 1996 · 174 citations

Engineering, Diffusion Barrier Properties, Vacuum Device +17

Metalorganic chemical vapor deposition of tantalum nitride by tertbutylimidotris(diethylamido)tantalum for advanced metallization

Mei‐Hui Tsai, Shuo Sun, Hsin‐Tien Chiu et al. · Applied Physics Letters · 1995 · 78 citations

Engineering, Solid-state Chemistry, Thin Film Process Technology +16

Metal-organic chemical vapor deposition of tantalum nitride barrier layers for ULSI applications

Mei‐Hui Tsai, Shuo Sun, C.P. Lee et al. · Thin Solid Films · 1995 · 54 citations

Materials Engineering, Materials Science, Barrier Layers +8

Syntheses and characterization of organoimido complexes of tantalum; potential single-source precursors to tantalum nitride

Hsin‐Tien Chiu, Shiow‐Huey Chuang, C.E. Tsai et al. · Polyhedron · 1998 · 32 citations

Inorganic Chemistry, Chemical Engineering, Potential Single-source Precursors +6

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