Concepedia

Publication | Closed Access

Metal-organic chemical vapor deposition of tantalum nitride barrier layers for ULSI applications

DOI

54

Citations

16

References

1995

Year

Mei‐Hui Tsai, Shuo Sun, C.P. Lee, Hsin‐Tien Chiu, C.E. Tsai, Shiow‐Huey Chuang, Sheng‐Tang Wu
Thin Solid Films

References

YearCitations

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