Concepedia

Shiow‐Huey Chuang

SC

25

Publications

958

Citations

19

H-Index

1990

Active since

Affiliations

National Yang Ming Chiao Tung University(Current)

National University of Kaohsiung

National Taiwan University

National Tsing Hua University

Institute of Electronics

Shiow‐Huey Chuang is an author at National Yang Ming Chiao Tung University specializing in engineering, materials science, and chemistry.

Top concepts

EngineeringMaterial ScienceChemistrySurface ScienceMaterials EngineeringApplied PhysicsInorganic ChemistryChemical EngineeringThin FilmsCatalysis

Publications per year

1990–2024

25

Publications

25

Comparison of the diffusion barrier properties of chemical-vapor-deposited TaN and sputtered TaN between Cu and Si

Mei‐Hui Tsai, Shuo Sun, C.E. Tsai et al. · Journal of Applied Physics · 1996 · 174 citations

Engineering, Diffusion Barrier Properties, Vacuum Device +17

Tungsten nitride thin films prepared by MOCVD

Hsin‐Tien Chiu, Shiow‐Huey Chuang · Journal of materials research/Pratt's guide to venture capital sources · 1993 · 80 citations

Materials Science, Engineering, Surface Science +4

Metalorganic chemical vapor deposition of tantalum nitride by tertbutylimidotris(diethylamido)tantalum for advanced metallization

Mei‐Hui Tsai, Shuo Sun, Hsin‐Tien Chiu et al. · Applied Physics Letters · 1995 · 78 citations

Engineering, Solid-state Chemistry, Thin Film Process Technology +16

Metalorganic chemical vapor deposition of tungsten nitride for advanced metallization

Mei‐Hui Tsai, Shuo Sun, Hsin‐Tien Chiu et al. · Applied Physics Letters · 1996 · 64 citations

Engineering, Thin Film Process Technology, Chemical Deposition +16

Metal-organic chemical vapor deposition of tantalum nitride barrier layers for ULSI applications

Mei‐Hui Tsai, Shuo Sun, C.P. Lee et al. · Thin Solid Films · 1995 · 54 citations

Materials Engineering, Materials Science, Barrier Layers +8

Rows per page

1–5 of 25