Concepedia

Takeo Katoh

TK

Statistics

Publications

14

Citations

310

H-Index

12

Active since

2001

Affiliations

Hanyang University(Current)

Takeo Katoh is an author at Hanyang University specializing in materials science, materials engineering, and surface science.

Publications per year

2001–2006

14

Publications

14

Effects of Abrasive Morphology and Surfactant Concentration on Polishing Rate of Ceria Slurry

Takeo Katoh, Hyun-Goo Kang, Ungyu Paik et al. · Japanese Journal of Applied Physics · 2003 · 45 citations · Full text

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Influence of the electrokinetic behaviors of abrasive ceria particles and the deposited plasma-enhanced tetraethylorthosilicate and chemically vapor deposited Si<sub>3</sub>N<sub>4</sub> films in an aqueous medium on chemical mechanical planarization for shallow trench isolation

Sangkyun Kim, Sangkyu Lee, Ungyu Paik et al. · Journal of materials research/Pratt's guide to venture capital sources · 2003 · 43 citations

, , +17

Surfactant Effect on Oxide-to-Nitride Removal Selectivity of Nano-abrasive Ceria Slurry for Chemical Mechanical Polishing

Jea‐Gun Park, Takeo Katoh, Won-Mo Lee et al. · Japanese Journal of Applied Physics · 2003 · 36 citations

, , +17

Effect of Molecular Weight of Surfactant in Nano Ceria Slurry on Shallow Trench Isolation Chemical Mechanical Polishing (CMP)

Hyun-Goo Kang, Takeo Katoh, Myung-Yoon Lee et al. · Japanese Journal of Applied Physics · 2004 · 28 citations

, , +14

Influence of Physical Characteristics of Ceria Particles on Polishing Rate of Chemical Mechanical Planarization for Shallow Trench Isolation

Sangkyun Kim, Phil-Won Yoon, Ungyu Paik et al. · Japanese Journal of Applied Physics · 2004 · 24 citations

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