Concepedia

Won-Mo Lee

WL

Statistics

Publications

2

Citations

50

H-Index

2

Active since

2003

Affiliations

Hanyang University(Current)

Won-Mo Lee is an author at Hanyang University specializing in surface science, abrasive particles, and materials engineering.

Publications per year

2003–2003

2

Publications

2

Surfactant Effect on Oxide-to-Nitride Removal Selectivity of Nano-abrasive Ceria Slurry for Chemical Mechanical Polishing

Jea‐Gun Park, Takeo Katoh, Won-Mo Lee et al. · Japanese Journal of Applied Physics · 2003 · 36 citations

, , +17

Dependence of Nanotopography Impact on Abrasive Size and Surfactant Concentration in Ceria Slurry for Shallow Trench Isolation Chemical Mechanical Polishing

Hyun-Goo Kang, Takeo Katoh, Won-Mo Lee et al. · Japanese Journal of Applied Physics · 2003 · 14 citations

, , +17

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