Concepedia

Phil-Won Yoon

PY

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Publications

1

Citations

24

H-Index

1

Active since

2004

Affiliations

Hanyang University(Current)

Phil-Won Yoon is an author at Hanyang University specializing in removal, chemical mechanical planarization, and ceramic powders.

Publications per year

2004–2004

1

Publications

1

Influence of Physical Characteristics of Ceria Particles on Polishing Rate of Chemical Mechanical Planarization for Shallow Trench Isolation

Sangkyun Kim, Phil-Won Yoon, Ungyu Paik et al. · Japanese Journal of Applied Physics · 2004 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +14

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