Concepedia

T. Iwabuchi

TI

Statistics

Publications

14

Citations

485

H-Index

13

Active since

1988

Affiliations

Oki Electric Industry (Japan)(Current)

Waseda University

Advanced Research Institute

T. Iwabuchi is an author at Oki Electric Industry (Japan) specializing in materials science, materials engineering, and semiconductor thin films.

Publications per year

1988–2002

14

Publications

14

Novel N/sub 2/O-oxynitridation technology for forming highly reliable EEPROM tunnel oxide films

Hisashi Fukuda, Makoto Yasuda, T. Iwabuchi et al. · IEEE Electron Device Letters · 1991 · 112 citations

Natural Sciences, Materials Engineering, Materials Science +16

Crystallization of Sr<sub>0.7</sub>Bi<sub>2.3</sub>Ta<sub>2</sub>O<sub>9+α</sub> Thin Films by Chemical Liquid Deposition

Ichiro Koiwa, Takao Kanehara, Juro Mita et al. · Japanese Journal of Applied Physics · 1996 · 65 citations

Natural Sciences, Materials Engineering, Materials Science +17

High performance dual-gate sub-halfmicron CMOSFETs with 6 nm-thick nitride SiO/sub 2/ films in an N/sub 2/O ambient

Akira Uchiyama, Hisashi Fukuda, T. Hayashi et al. · 2002 · 50 citations

Engineering, Electrical Engineering, Materials Science +17

Characterization of SiO2/Si(100) interface structure of ultrathin SiO2 films using spatially resolved electron energy loss spectroscopy

Hisashi Fukuda, Makoto Yasuda, T. Iwabuchi · Applied Physics Letters · 1992 · 40 citations

Engineering, Materials Engineering, Materials Science +17

Process dependence of the SiO2/Si(100) interface trap density of ultrathin SiO2 films

Hisashi Fukuda, Makoto Yasuda, T. Iwabuchi et al. · Journal of Applied Physics · 1992 · 39 citations

Engineering, Materials Engineering, Materials Science +16

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