Concepedia
2
Publications
21
Citations
H-Index
2015
Active since
Affiliations
GlobalFoundries (United States)(Current)
Mohamed Salama is an author at GlobalFoundries (United States).
Publications per year
2015–2017
Design intent optimization at the beyond 7nm node: the intersection of DTCO and EUVL stochastic mitigation techniques
Michael Crouse, Lars W. Liebmann, Vince Plachecki et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2017 · 11 citations
Efficient etch bias compensation techniques for accurate on-wafer patterning
Mohamed Salama, Ayman Hamouda · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 10 citations
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