Concepedia

Ch. Kaufmann

CK

Statistics

Publications

5

Citations

189

H-Index

5

Active since

1997

Affiliations

Chemnitz University of Technology(Current)

Ch. Kaufmann is an author at Chemnitz University of Technology specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsCorrosionMicrostructureSurface ScienceMaterials EngineeringThin FilmsMicroelectronicsOptical Materials

Publications per year

1997–2001

5

Publications

5

Optical properties and mechanical stress in SiO2/Nb2O5 multilayers

Frank Richter, H. Küpfer, Peter Schlott et al. · Thin Solid Films · 2001 · 74 citations

Materials Science, Optical Materials, Engineering +6

Textures of thin copper films

W.-M. Kuschke, A. Kretschmann, R. Keller et al. · Journal of materials research/Pratt's guide to venture capital sources · 1998 · 40 citations

Materials Science, Engineering, Surface Science +5

TiN diffusion barriers for copper metallization

T. Werner, Andreas Ehrlich, M. Rennau et al. · Microelectronic Engineering · 1997 · 39 citations

Materials Engineering, Materials Science, Engineering +6

Investigation of copper metallization induced failure of diode structures with and without a barrier layer

Ch. Kaufmann, M. Rennau, Th. Werner · Microelectronic Engineering · 1997 · 24 citations

Materials Science, Materials Engineering, Electrical Engineering +10

W/TiN double layers as barrier system for use in Cu metallization

M. Markert, T. Werner, Andreas Ehrlich et al. · Microelectronic Engineering · 1997 · 12 citations

Materials Science, Materials Engineering, W/tin Double Layers +11

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