Statistics
Publications
7
Citations
279
H-Index
7
Active since
1994
Affiliations
Chemnitz University of Technology(Current)
Andreas Ehrlich is an author at Chemnitz University of Technology specializing in natural sciences, materials science, and materials engineering.
Publications per year
1994–2013
7
7
F. Elstner, Andreas Ehrlich, H. Giegengack et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1994 · 77 citations
Natural Sciences, Materials Engineering, Materials Science +16
TiN diffusion barriers for copper metallization
T. Werner, Andreas Ehrlich, M. Rennau et al. · Microelectronic Engineering · 1997 · 39 citations
Natural Sciences, Materials Engineering, Materials Science +14
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