Concepedia

Runshen Xu

RX

Statistics

Publications

4

Citations

95

H-Index

4

Active since

1988

Affiliations

University of Illinois Chicago(Current)

Runshen Xu is an author at University of Illinois Chicago specializing in natural sciences, thin-film materials, and materials science.

Publications per year

1988–2013

4

Publications

4

Atomic layer deposition and characterization of stoichiometric erbium oxide thin dielectrics on Si(100) using (CpMe)3Er precursor and ozone

Runshen Xu, Qian Tao, Yi Yang et al. · Applied Surface Science · 2012 · 55 citations · Full text

, , +16

Atomic Layer Deposition and Characterization of Amorphous Er<sub>x</sub>Ti<sub>1-x</sub>O<sub>y</sub>Dielectric Ultra-Thin Films

Runshen Xu, Christos G. Takoudis · ECS Journal of Solid State Science and Technology · 2012 · 15 citations · Full text

, , +17

Growth Characteristics and Properties of Yttrium Oxide Thin Films by Atomic Layer Deposition from Novel Y(iPrCp)<sub>3</sub> Precursor and O<sub>3</sub>

Runshen Xu, Sathees Kannan Selvaraj, Nasim Azimi et al. · ECS Transactions · 2013 · 14 citations

, , +17

The three-dimensional dynamic DuMond diagram for X-ray diffraction analysis of nearly perfect crystals

Runshen Xu, Li · Journal of Applied Crystallography · 1988 · 11 citations

, , +10

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