Qian Tao

Atomic layer deposition and characterization of stoichiometric erbium oxide thin dielectrics on Si(100) using (CpMe)3Er precursor and ozone

Runshen Xu, Qian Tao, Yi Yang et al. · Applied Surface Science · 2012 · 55 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +16

Selective atomic layer deposition of HfO2 on copper patterned silicon substrates

Qian Tao, Gregory Jursich, Christos G. Takoudis · Applied Physics Letters · 2010 · 34 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

On the initial growth of atomic layer deposited TiO2 films on silicon and copper surfaces

Qian Tao, Kirsten Overhage, Gregory Jursich et al. · Thin Solid Films · 2012 · 32 citations

Natural Sciences, Materials Engineering, Materials Science +17

Atomic Layer Deposition of HfO[sub 2], TiO[sub 2], and Hf[sub x]Ti[sub 1−x]O[sub 2] Using Metal (Diethylamino) Precursors and H[sub 2]O

Qian Tao, Adam Kueltzo, Manish Kumar Singh et al. · Journal of The Electrochemical Society · 2010 · 19 citations

Natural Sciences, Materials Engineering, Materials Science +17

Novel functionalization of Ti-V alloy and Ti-II using atomic layer deposition for improved surface wettability

Sweetu Patel, Arman Butt, Qian Tao et al. · Colloids and Surfaces B Biointerfaces · 2013 · 16 citations

Natural Sciences, Materials Engineering, Materials Science +17