Concepedia

Sathees Kannan Selvaraj

SK

Statistics

Publications

5

Citations

115

H-Index

5

Active since

2013

Affiliations

University of Illinois Chicago(Current)

Sathees Kannan Selvaraj is an author at University of Illinois Chicago specializing in applied physics, engineering, and thin films.

Top concepts

Publications per year

2013–2015

5

Publications

5

Selective atomic layer deposition of zirconia on copper patterned silicon substrates using ethanol as oxygen source as well as copper reductant

Sathees Kannan Selvaraj, Jaya Parulekar, Christos G. Takoudis · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 39 citations

, , +20

Atomic layer deposition of environmentally benign SnTiOx as a potential ferroelectric material

Siliang Chang, Sathees Kannan Selvaraj, Yoon-Young Choi et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 24 citations

, , +17

Design and implementation of a novel portable atomic layer deposition/chemical vapor deposition hybrid reactor

Sathees Kannan Selvaraj, Gregory Jursich, Christos G. Takoudis · Review of Scientific Instruments · 2013 · 22 citations · Full text

Growth behavior and properties of atomic layer deposited tin oxide on silicon from novel tin(II)acetylacetonate precursor and ozone

Sathees Kannan Selvaraj, Alan Feinerman, Christos G. Takoudis · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2013 · 16 citations

, , +19

Growth Characteristics and Properties of Yttrium Oxide Thin Films by Atomic Layer Deposition from Novel Y(iPrCp)<sub>3</sub> Precursor and O<sub>3</sub>

Runshen Xu, Sathees Kannan Selvaraj, Nasim Azimi et al. · ECS Transactions · 2013 · 14 citations

, , +16

1–5 of 5