Concepedia

Tatsuyuki Saito

TS

2

Publications

98

Citations

2

H-Index

1991

Active since

Affiliations

Hitachi (Japan)(Current)

Tatsuyuki Saito is an author at Hitachi (Japan) specializing in applied physics, materials science, and engineering.

Top concepts

EngineeringApplied PhysicsMaterial SciencePhysicsThin FilmsMicrostructureNanotechnologySurface ScienceMicroelectronicsCrystalline Defects

Publications per year

1991–2006

2

Publications

2

Formation of Copper Thin Films by a Low Kinetic Energy Particle Process

Tadahiro Ohmi, Tatsuyuki Saito, M. Otsuki et al. · Journal of The Electrochemical Society · 1991 · 79 citations

Materials Science, Crystal Structure, Ion Implantation +13

Observation of Microstructures in the Longitudinal Direction of Very Narrow Cu Interconnects

Khyoupin Khoo, Jin Onuki, Takahiro Nagano et al. · Japanese Journal of Applied Physics · 2006 · 19 citations

Materials Science, Electrical Engineering, Electromigration Technique +14

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