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Publications
1
Citations
16
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Active since
2009
Noriaki Maehara is an author specializing in implant surgery, ion implantation, and nuclear instrumentation.
Publications per year
2009–2009
Cluster Ion Implantation System: Claris for Beyond 45nm Device Fabrication (Ii)
Masayasu Tanjyo, Nariaki Hamamoto, Tsutomu Nagayama et al. · ECS Transactions · 2009 · 16 citations
Engineering, Materials Engineering, Materials Science +9
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