Harry Shields

Xenon target performance characteristics for laser-produced plasma EUV sources

Harry Shields, S. Fornaca, Michael Petach et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 46 citations

Materials Science, Engineering, Optical Properties +11

<title>Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography</title>

I. C. E. Turcu, I. N. Ross, P. Trenda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 31 citations

X-ray Spectroscopy, Engineering, Microscopy +26

Absorption of extreme ultraviolet light in a laser produced gas-jet plasma source

Michael P. Kanouff, Harry Shields, Luis J. Bernardez et al. · Journal of Applied Physics · 2001 · 15 citations

Ultraviolet Light, Optical Materials, Engineering +22

<title>Laser-produced plasma (LPP) scale-up and commercialization</title>

Richard H. Moyer, Harry Shields, Armando Martos et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 13 citations

Electrical Engineering, Advanced Laser Processing, Engineering +13

Performance upgrades in the EUV engineering test stand

Daniel A. Tichenor, William C. Replogle, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Po Box 1, Engineering, Electron-beam Lithography +17