Harry Shields

Xenon target performance characteristics for laser-produced plasma EUV sources

Harry Shields, S. Fornaca, Michael Petach et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 49 citations

Natural Sciences, Materials Science, Physics +13

<title>Picosecond excimer laser-plasma x-ray source for microscopy, biochemistry, and lithography</title>

I. C. E. Turcu, I. N. Ross, P. Trenda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 31 citations

Natural Sciences, Biochemistry, Physics +13

Absorption of extreme ultraviolet light in a laser produced gas-jet plasma source

Michael P. Kanouff, Harry Shields, Luis J. Bernardez et al. · Journal of Applied Physics · 2001 · 16 citations

Natural Sciences, Physics, Optics +14

<title>Laser-produced plasma (LPP) scale-up and commercialization</title>

Richard H. Moyer, Harry Shields, Armando Martos et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 14 citations

Natural Sciences, Manufacturing Engineering, Physics +17

Performance upgrades in the EUV engineering test stand

Daniel A. Tichenor, William C. Replogle, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 11 citations

Engineering, Manufacturing Engineering, Digital Imaging +14