Statistics
Publications
3
Citations
106
H-Index
3
Active since
1999
J. Han is an author at University of Florida specializing in plasma etching, semiconductor devices, and physics.
Publications per year
1999–1999
3
3
Inductively coupled plasma etching of III–V semiconductors in BCl3-based chemistries
Tatsuro Maeda, J.W Lee, R. J. Shul et al. · Applied Surface Science · 1999 · 51 citations
High-Density Plasma-Induced Etch Damage of GaN
R. J. Shul, L. Zhang, A. G. Baca et al. · MRS Proceedings · 1999 · 31 citations · Full text
Inductively coupled plasma etching of III–V semiconductors in BCl3-based chemistries
Tatsuro Maeda, J.W Lee, R. J. Shul et al. · Applied Surface Science · 1999 · 24 citations
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