S. Yu. Shapoval

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Publications

Citations

1.6K

H-Index

Active since

1990

Affiliations

Institute of Microelectronics Technology and High Purity Materials(Current)

Institute for Physics of Microstructures

Ioffe Institute

Kotelnikov Institute of Radioengineering and Electronics of the Russian Academy of Sciences

Russian Academy of Sciences

S. Yu. Shapoval is an author at Institute of Microelectronics Technology and High Purity Materials specializing in materials science, engineering, and semiconductor materials.

ORCID

Publications per year

1990–2017

Publications

Microfabricated adhesive mimicking gecko foot-hair

A. K. Geǐm, S. V. Dubonos, I. V. Grigorieva et al. · Nature Materials · 2003 · 1.3K citations

Engineering, Bioengineering, Biological Engineering +9

Cubic boron nitride films deposited by electron cyclotron resonance plasma

S. Yu. Shapoval, V. T. Petrashov, Oleg Popov et al. · Applied Physics Letters · 1990 · 53 citations

Natural Sciences, Materials Science, Physics +17

High-responsivity terahertz detection by on-chip InGaAs/GaAs field-effect-transistor array

V. V. Popov, D. M. Ermolaev, K. V. Maremyanin et al. · Applied Physics Letters · 2011 · 52 citations

Engineering, Electrical Engineering, Materials Science +14

Electron cyclotron resonance plasma chemical vapor deposition of large area uniform silicon nitride films

S. Yu. Shapoval, V. T. Petrashov, Oleg A. Popov et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electron transport properties of double delta-doped GaAs structures grown by low-pressure metalorganic chemical vapor deposition

V. V. Valyaev, S. Yu. Shapoval · Applied Physics Letters · 1998 · 21 citations

Engineering, Materials Engineering, Materials Science +17

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