Oleg A. Popov

Power dissipated in low-pressure radio-frequency discharge plasmas

Oleg A. Popov, Valery Godyak · Journal of Applied Physics · 1985 · 145 citations

Natural Sciences, Physics, Electromagnetics +15

Characteristics of electron cyclotron resonance plasma sources

Oleg A. Popov · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 88 citations

Natural Sciences, Electrical Engineering, Physics +15

Silicon nitride formation from a silane–nitrogen electron cyclotron resonance plasma

J. C. Barbour, H. J. Stein, Oleg A. Popov et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 64 citations

Natural Sciences, Chemistry, Materials Science +14

Electron cyclotron resonance plasma chemical vapor deposition of large area uniform silicon nitride films

S. Yu. Shapoval, V. T. Petrashov, Oleg A. Popov et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

Electron cyclotron resonance plasmas excited by rectangular and circular microwave modes

Oleg A. Popov · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 27 citations

Natural Sciences, Electrical Engineering, Physics +14