5
Publications
160
Citations
5
H-Index
1994
Active since
Affiliations
S. R. Das is an author at Institute for Microstructural Sciences specializing in materials science, engineering, and surface science.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceMaterials EngineeringThin FilmsMicrostructureNanotechnologyChemistryX-ray Spectroscopy
Publications per year
1994–1998
5
5
Material aspects of nickel silicide for ULSI applications
Dan‐Xia Xu, S. R. Das, C. J. Peters et al. · Thin Solid Films · 1998 · 73 citations
Thickness dependence of the properties and thermal stability of PtSi films
S. R. Das, K. Sheergar, Dan‐Xia Xu et al. · Thin Solid Films · 1994 · 37 citations
Process Windows of Nickel and Platinum Silicides in Deep Sub-Micron Regime
Dan‐Xia Xu, S. R. Das, J. P. McCaffrey et al. · MRS Proceedings · 1995 · 28 citations
S. J. Naftel, I. Coulthard, T. K. Sham et al. · Physical review. B, Condensed matter · 1998 · 12 citations
Thermal Stability of Nickel Silicide Films
S. R. Das, Dan‐Xia Xu, M. Nournia et al. · MRS Proceedings · 1996 · 10 citations
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