Hiromu Yamaguchi

Barrier layers for realization of high capacitance density in SrTiO3 thin-film capacitor on silicon

Toshiyuki Sakuma, Shintaro Yamamichi, S. Matsubara et al. · Applied Physics Letters · 1990 · 154 citations

High-temperature Annealing, Engineering, Thin Film Process Technology +16

Structural and Electrical Characterization of SrTiO₃ Thin Films Prepared by Metal Organic Chemical Vapor Deposition

Hiromu Yamaguchi, Pierre‐Yves Lesaicherre, Toshiyuki Sakuma et al. · Japanese Journal of Applied Physics · 1993 · 59 citations

Materials Science, Oxide Heterostructures, Chemical Engineering +15

Reactive Coevaporation Synthesis and Characterization of SrTiO₃ Thin Films

Hiromu Yamaguchi, S. Matsubara, Yoichi Miyasaka · Japanese Journal of Applied Physics · 1991 · 52 citations

Materials Science, Materials Engineering, Applied Chemistry +13

SrTiO₃ thin films by mocvd for 1 gbit DRAM application

Pierre‐Yves Lesaicherre, Hiromu Yamaguchi, Yoichi Miyasaka et al. · Integrated ferroelectrics · 1995 · 48 citations

Thin Film Physics, Engineering, Emerging Memory Technology +18

Chemical Vapor Deposition of  ( Ba , Sr ) TiO3

Masaji Yoshida, Hiromu Yamaguchi, Toshiyuki Sakuma et al. · Journal of The Electrochemical Society · 1995 · 47 citations

Materials Engineering, Materials Science, Chemical Engineering +14