Fu Hsiang Ko

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Active since

2001

Affiliations

National Institutes of Applied Research(Current)

National Yang Ming Chiao Tung University

Merck & Co., Inc., Rahway, NJ, USA (United States)

Fu Hsiang Ko is an author at National Institutes of Applied Research specializing in surface science, chemical cleaning agents, and materials science.

Publications per year

2001–2002

Publications

One-Step Cleaning Solution to Replace the Conventional RCA Two-Step Cleaning Recipe for Pregate Oxide Cleaning

Tung Ming Pan, Tan Fu Lei, Tien Sheng Chao et al. · Journal of The Electrochemical Society · 2001 · 33 citations

Engineering, Materials Engineering, Materials Science +17

Comparison of novel cleaning solutions with various chelating agents for post-CMP cleaning on poly-Si film

Tung Ming Pan, Tan Fu Lei, Fu Hsiang Ko et al. · IEEE Transactions on Semiconductor Manufacturing · 2001 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +17

Performance Evaluation of Cleaning Solutions Enhanced with Tetraalkylammonium Hydroxide Substituents for Post-CMP Cleaning on Poly-Si Film

Tung Ming Pan, Tan Fu Lei, Fu Hsiang Ko et al. · Journal of The Electrochemical Society · 2002 · 15 citations

Engineering, Materials Engineering, Materials Science +17

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