Concepedia

Tatsuya Yanagida

TY

Statistics

Publications

11

Citations

246

H-Index

10

Active since

2001

Affiliations

Kyushu University(Current)

Tatsuya Yanagida is an author at Kyushu University specializing in engineering, high-power lasers, and photonics.

Top concepts

EngineeringPhotonicsHigh-power LasersLaser ApplicationsApplied PhysicsHigh-energy LasersLaser PhysicsLaser Plasma PhysicsElectrical EngineeringPulse Power

Publications per year

2001–2022

11

Publications

11

Performance of one hundred watt HVM LPP-EUV source

Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 45 citations

100W 1st generation laser-produced plasma light source system for HVM EUV lithography

Hakaru Mizoguchi, Tamotsu Abe, Yukio Watanabe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 37 citations

Photonics, Electrical Engineering, Engineering +15

LPP-EUV light source development for high volume manufacturing lithography

Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 31 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Short-Pulse X-Ray Generation via Thomson Scattering in 0° and 90° Interactions

M. Yorozu, Jinfeng Yang, Yasuhiro Okada et al. · Japanese Journal of Applied Physics · 2001 · 26 citations

X-ray Spectroscopy, Engineering, Laser Applications +20

Performance of new high-power HVM LPP-EUV source

Hakaru Mizoguchi, Hiroaki Nakarai, Tamotsu Abe et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

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