Jing Min

Formation of buried oxide in silicon using separation by plasma implantation of oxygen

Jingbao Liu, S. Sundar Kumar Iyer, Chenming Hu et al. · Applied Physics Letters · 1995 · 61 citations

Engineering, Materials Engineering, Materials Science +13

Ion-cut silicon-on-insulator fabrication with plasma immersion ion implantation

Xiang Lü, S. Sundar Kumar Iyer, Chenming Hu et al. · Applied Physics Letters · 1997 · 43 citations

Engineering, Physics, Microfabrication +12

Separation of plasma implantation of oxygen to form silicon on insulator

Xiang Lü, S. Sundar Kumar Iyer, Jingbao Liu et al. · Applied Physics Letters · 1997 · 29 citations

Engineering, Electrical Engineering, Electronic Materials +16

Separation by plasma implantation of oxygen (SPIMOX) operational phase space

S. Sundar Kumar Iyer, Xiang Lü, Jingbao Liu et al. · IEEE Transactions on Plasma Science · 1997 · 20 citations

Natural Sciences, Physics, Implant Surgery +8

Combined impurity gettering effects of helium-induced cavities and oxygen precipitates created by plasma immersion ion implantation

Jing Min, Paul K. Chu, Xiang Lü et al. · Thin Solid Films · 1997 · 11 citations

Natural Sciences, Materials Science, Physics +12