Concepedia

Chih Hung Tung

CH

2

Publications

37

Citations

2

H-Index

2006

Active since

Affiliations

Institute of Microelectronics(Current)

National University of Singapore

Chih Hung Tung is an author at Institute of Microelectronics specializing in microelectronics, engineering, and electrical engineering.

Top concepts

Publications per year

2006–2007

2

Publications

2

Plasma Etching for Sub-45-nm TaN Metal Gates on High-$k$ Dielectrics

Vladimir Bliznetsov, L. K. Bera, Haw Yun Soo et al. · IEEE Transactions on Semiconductor Manufacturing · 2007 · 20 citations

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Full Silicidation of Silicon Gate Electrodes Using Nickel-Terbium Alloy for MOSFET Applications

Andy Eu-Jin Lim, Rinus Tek Po Lee, Chih Hung Tung et al. · Journal of The Electrochemical Society · 2006 · 17 citations

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