Zhineng Fan

Ion-cut silicon-on-insulator fabrication with plasma immersion ion implantation

Xiang Lü, S. Sundar Kumar Iyer, Chenming Hu et al. · Applied Physics Letters · 1997 · 43 citations

Engineering, Physics, Microfabrication +12

Sample stage induced dose and energy nonuniformity in plasma immersion ion implantation of silicon

Zhineng Fan, Paul K. Chu, Chung Chan et al. · Applied Physics Letters · 1998 · 24 citations

Engineering, Electrical Engineering, Electronic Materials +14

Separation by plasma implantation of oxygen (SPIMOX) operational phase space

S. Sundar Kumar Iyer, Xiang Lü, Jingbao Liu et al. · IEEE Transactions on Plasma Science · 1997 · 20 citations

Natural Sciences, Physics, Implant Surgery +8

Low pressure plasma immersion ion implantation of silicon

Zhineng Fan, Qingchuan Chen, Paul K. Chu · IEEE Transactions on Plasma Science · 1998 · 19 citations

Natural Sciences, Physics, Electronic Materials +15

<i>In situ</i> sample temperature measurement in plasma immersion ion implantation

Xiubo Tian, Zhineng Fan, Xuchu Zeng et al. · Review of Scientific Instruments · 1999 · 17 citations

Natural Sciences, Physics, Instrumentation +14