Concepedia

Xuchu Zeng

XZ

Statistics

Publications

14

Citations

248

H-Index

11

Active since

1996

Affiliations

City University of Hong Kong(Current)

Australian National University

Xuchu Zeng is an author at City University of Hong Kong specializing in engineering, electrical engineering, and applied physics.

Top concepts

EngineeringElectrical EngineeringApplied PhysicsMicroelectronicsSurface ScienceElectrophysiologyMaterial ScienceBiomedical EngineeringInstrumentationMicrofabrication

Publications per year

1996–2004

14

Publications

14

Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode

Xuchu Zeng, Baoyin Tang, Paul K. Chu · Applied Physics Letters · 1996 · 41 citations · Full text

Electrical Engineering, Ion Implantation, Engineering +10

Direct current plasma implantation using a grounded conducting grid

Dixon T. K. Kwok, Xuchu Zeng, Chung Chan et al. · Journal of Applied Physics · 2000 · 28 citations

Electrical Engineering, Grounded Conducting Grid, Engineering +13

Damage in hydrogen plasma implanted silicon

Lianwei Wang, Ricky K.Y. Fu, Xuchu Zeng et al. · Journal of Applied Physics · 2001 · 25 citations

Materials Science, Materials Engineering, Ion Implantation +13

Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an auxiliary electrode for finite rise-time voltage pulses

Xuchu Zeng, T.K. Kwok, Aiguo Liu et al. · IEEE Transactions on Plasma Science · 1998 · 21 citations

Electrical Engineering, Engineering, Interior Surface +7

Effects of tube length and radius for inner surface plasma immersion ion implantation using an auxiliary electrode

Dixon T. K. Kwok, Xuchu Zeng, Qingchuan Chen et al. · IEEE Transactions on Plasma Science · 1999 · 19 citations

Electrical Engineering, Ion Implantation, Engineering +8

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