Concepedia

Qiongyan Yuan

QY

3

Publications

40

Citations

3

H-Index

2007

Active since

Affiliations

Chinese Academy of Sciences(Current)

Shanghai Institute of Optics and Fine Mechanics

Qiongyan Yuan is an author at Chinese Academy of Sciences specializing in instrumentation, calibration, and education.

Top concepts

Publications per year

2007–2012

3

Publications

3

Coma measurement by use of an alternating phase-shifting mask mark with a specific phase width

Zicheng Qiu, Xiangzhao Wang, Qiongyan Yuan et al. · Applied Optics · 2009 · 18 citations

Coma measurement of projection optics in lithographic tools based on relative image displacements at multiple illumination settings

Qiongyan Yuan, Xiangzhao Wang, Zicheng Qiu et al. · Optics Express · 2007 · 12 citations · Full text

, , +18

Fast and accurate scatterometry metrology method for STI CMP step height process evaluation

Chih-Hsun Lin, Climbing Huang, Chia-Lin Hsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 10 citations

, , +21

Rows per page

1–3 of 3