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Chih-Hsun Lin

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Publications

1

Citations

10

H-Index

1

Active since

2012

Affiliations

United Microelectronics (Taiwan)(Current)

Chih-Hsun Lin is an author at United Microelectronics (Taiwan) specializing in instrumentation, spectroscopy, and measurement.

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Publications per year

2012–2012

1

Publications

1

Fast and accurate scatterometry metrology method for STI CMP step height process evaluation

Chih-Hsun Lin, Climbing Huang, Chia-Lin Hsu et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 10 citations

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