Deok-Sin Kil

Modified atomic layer deposition of RuO2 thin films for capacitor electrodes

Jin-Hyock Kim, Deok-Sin Kil, Seung-Jin Yeom et al. · Applied Physics Letters · 2007 · 53 citations

Natural Sciences, Materials Engineering, Materials Science +17

Ru Films from Bis(ethylcyclopentadienyl)ruthenium Using Ozone as a Reactant by Atomic Layer Deposition for Capacitor Electrodes

Ja-Yong Kim, Deok-Sin Kil, Jin-Hyock Kim et al. · Journal of The Electrochemical Society · 2012 · 37 citations

Natural Sciences, Materials Engineering, Materials Science +17

Role of Cyclopentadienyl Ligands of Group 4 Precursors toward High-Temperature Atomic Layer Deposition

Tran Thi Ngoc Van, Donghak Jang, Eun‐Ae Jung et al. · The Journal of Physical Chemistry C · 2022 · 26 citations

Natural Sciences, Materials Engineering, Materials Science +17

Adsorption of Titanium Halides on Nitride and Oxide Surfaces during Atomic Layer Deposition: A DFT Study

Jeongwoo Park, Neung Kyung Yu, Donghak Jang et al. · Coatings · 2020 · 21 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Leakage Current Characteristics of (Ba,Sr)TiO₃ Thin Films Deposited on Ru Electrodes Prepared by Metal Organic Chemical Vapor Deposition

Deok-Sin Kil, Jong-Bum Park, Dong‐Soo Yoon et al. · Japanese Journal of Applied Physics · 2001 · 10 citations

Natural Sciences, Materials Engineering, Materials Science +17