2
Publications
46
Citations
2
H-Index
1999
Active since
Affiliations
University of Illinois Chicago(Current)
Se-Young An is an author at University of Illinois Chicago specializing in engineering, applied physics, and nanotechnology.
Top concepts
EngineeringChemistryNanomaterialsNanotechnologyPhotochemistryApplied PhysicsInstrumentationOptoelectronicsSurface ScienceMaterial Science
Publications per year
1999–2014
2
2
Integration of a MEMS-type vacuum pump with a MEMS-type Pirani pressure gauge
Tomasz Grzebyk, Anna Górecka-Drzazga, Jan Dziuban et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2014 · 14 citations
Electrical Engineering, Mems-type Pirani Sensor, Engineering +13
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